The applying of digital interferometric methods to nano-displacement registration
- Pages
- 85-89
Abstract
The estimation of limiting sensitivity of digital holographic methods of measurements of a surface of movings is lead}. Influence of a degree of digitization of hardware on limiting the sensitivity of digital holographic measurements is analysed. Parameters of surface — acoustic waves with amplitudes of fluctuations less than 10 nanometers are experimentally investigated.
Reference
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