An analysis of processes of wall destruction in a test rig’s vacuum chamber
- Pages
- 50-56
Abstract
This article presents the results of studies into the interaction between the walls of a test rig’s vacuum chamber and an SPD plasma jet. A method for calculating the spray elements of the vacuum chamber has been devised. The article presents the results of calculation of vacuum test chamber sputtering with an SPD-100 and SPD-100D plasma stream, as well as a way to protect the chamber’s walls from sputtering.
Reference
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